Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy

J. Vila-Comamala; S. Gorelick; E. Färm; C. M. Kewish; A. Diaz; V. A. Guzenko; R. Barrett; J. Raabe; A. Menzel; O. Bunk; M. Ritala; C. David

doi:10.1063/1.3625337

Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy

J. Vila-Comamala, S. Gorelick, E. Färm, C. M. Kewish, A. Diaz, V. A. Guzenko, R. Barrett, J. Raabe, A. Menzel, O. Bunk, M. Ritala, C. David

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

2 Citations (Scopus)

Abstract

We demonstrate the highest spatial resolution reported in scanning transmission x-ray microscopy to date. For the first time in x-ray microscopy, features below 10 nm in width were resolved in the soft x-ray regime (1.2 keV) and 20-nm lines and spaces were visible at multi-keV photon energies (6.2 keV). These achievements were accomplished using zone-doubled Fresnel zone plates. These lenses were fabricated by combining electron-beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone-doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2-keV photon energy.

Original language	English
Title of host publication	10th International Conference on X-Ray Microscopy
Pages	192-195
Number of pages	4
Volume	1365
DOIs	https://doi.org/10.1063/1.3625337
Publication status	Published - 1 Dec 2010
Externally published	Yes
Event	10th International Conference on X-Ray Microscopy - Chicago, United States of America Duration: 15 Aug 2010 → 20 Aug 2010

Conference

Conference	10th International Conference on X-Ray Microscopy
Country/Territory	United States of America
City	Chicago
Period	15/08/10 → 20/08/10

Keywords

atomic layer deposition
electron beam lithography
x-ray diffractive optics
X-ray microscopy

Access to Document

10.1063/1.3625337

Cite this

@inproceedings{3088534dd5424a7cab5e869e5488a934,

title = "Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy",

abstract = "We demonstrate the highest spatial resolution reported in scanning transmission x-ray microscopy to date. For the first time in x-ray microscopy, features below 10 nm in width were resolved in the soft x-ray regime (1.2 keV) and 20-nm lines and spaces were visible at multi-keV photon energies (6.2 keV). These achievements were accomplished using zone-doubled Fresnel zone plates. These lenses were fabricated by combining electron-beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone-doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2-keV photon energy.",

keywords = "atomic layer deposition, electron beam lithography, x-ray diffractive optics, X-ray microscopy",

author = "J. Vila-Comamala and S. Gorelick and E. F{\"a}rm and Kewish, {C. M.} and A. Diaz and Guzenko, {V. A.} and R. Barrett and J. Raabe and A. Menzel and O. Bunk and M. Ritala and C. David",

year = "2010",

month = dec,

day = "1",

doi = "10.1063/1.3625337",

language = "English",

isbn = "9780735409255",

volume = "1365",

pages = "192--195",

booktitle = "10th International Conference on X-Ray Microscopy",

note = "10th International Conference on X-Ray Microscopy ; Conference date: 15-08-2010 Through 20-08-2010",

}

Vila-Comamala, J, Gorelick, S, Färm, E, Kewish, CM, Diaz, A, Guzenko, VA, Barrett, R, Raabe, J, Menzel, A, Bunk, O, Ritala, M & David, C 2010, Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy. in 10th International Conference on X-Ray Microscopy. vol. 1365, pp. 192-195, 10th International Conference on X-Ray Microscopy, Chicago, Illinois, United States of America, 15/08/10. https://doi.org/10.1063/1.3625337

Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy. / Vila-Comamala, J.; Gorelick, S.; Färm, E.; Kewish, C. M.; Diaz, A.; Guzenko, V. A.; Barrett, R.; Raabe, J.; Menzel, A.; Bunk, O.; Ritala, M.; David, C.

10th International Conference on X-Ray Microscopy. Vol. 1365 2010. p. 192-195.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy

AU - Vila-Comamala, J.

AU - Gorelick, S.

AU - Färm, E.

AU - Kewish, C. M.

AU - Diaz, A.

AU - Guzenko, V. A.

AU - Barrett, R.

AU - Raabe, J.

AU - Menzel, A.

AU - Bunk, O.

AU - Ritala, M.

AU - David, C.

PY - 2010/12/1

Y1 - 2010/12/1

N2 - We demonstrate the highest spatial resolution reported in scanning transmission x-ray microscopy to date. For the first time in x-ray microscopy, features below 10 nm in width were resolved in the soft x-ray regime (1.2 keV) and 20-nm lines and spaces were visible at multi-keV photon energies (6.2 keV). These achievements were accomplished using zone-doubled Fresnel zone plates. These lenses were fabricated by combining electron-beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone-doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2-keV photon energy.

AB - We demonstrate the highest spatial resolution reported in scanning transmission x-ray microscopy to date. For the first time in x-ray microscopy, features below 10 nm in width were resolved in the soft x-ray regime (1.2 keV) and 20-nm lines and spaces were visible at multi-keV photon energies (6.2 keV). These achievements were accomplished using zone-doubled Fresnel zone plates. These lenses were fabricated by combining electron-beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone-doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2-keV photon energy.

KW - atomic layer deposition

KW - electron beam lithography

KW - x-ray diffractive optics

KW - X-ray microscopy

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U2 - 10.1063/1.3625337

DO - 10.1063/1.3625337

M3 - Conference Paper

AN - SCOPUS:80053298574

SN - 9780735409255

VL - 1365

SP - 192

EP - 195

BT - 10th International Conference on X-Ray Microscopy

T2 - 10th International Conference on X-Ray Microscopy

Y2 - 15 August 2010 through 20 August 2010

ER -

Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy

Abstract

Conference

Keywords

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