Zone-doubled fresnel zone plates for scanning transmission X-ray microscopy

J. Vila-Comamala, S. Gorelick, E. Färm, C. M. Kewish, A. Diaz, V. A. Guzenko, R. Barrett, J. Raabe, A. Menzel, O. Bunk, M. Ritala, C. David

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

2 Citations (Scopus)

Abstract

We demonstrate the highest spatial resolution reported in scanning transmission x-ray microscopy to date. For the first time in x-ray microscopy, features below 10 nm in width were resolved in the soft x-ray regime (1.2 keV) and 20-nm lines and spaces were visible at multi-keV photon energies (6.2 keV). These achievements were accomplished using zone-doubled Fresnel zone plates. These lenses were fabricated by combining electron-beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone-doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2-keV photon energy.

Original languageEnglish
Title of host publication10th International Conference on X-Ray Microscopy
Pages192-195
Number of pages4
Volume1365
DOIs
Publication statusPublished - 1 Dec 2010
Externally publishedYes
Event10th International Conference on X-Ray Microscopy - Chicago, United States of America
Duration: 15 Aug 201020 Aug 2010

Conference

Conference10th International Conference on X-Ray Microscopy
CountryUnited States of America
CityChicago
Period15/08/1020/08/10

Keywords

  • atomic layer deposition
  • electron beam lithography
  • x-ray diffractive optics
  • X-ray microscopy

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