Zero displacement microelectromechanical force sensor using feedback control

Mustafa Bulut Coskun, Steven I Moore, Seyed O Reza Moheimani, Adrian Neild, Tuncay Alan

Research output: Contribution to journalArticleOtherpeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1 - 4
Number of pages4
JournalApplied Physics Letters
Volume104
Issue number15
DOIs
Publication statusPublished - 2014

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