Zero displacement microelectromechanical force sensor using feedback control

Mustafa Bulut Coskun, Steven I Moore, Seyed O Reza Moheimani, Adrian Neild, Tuncay Alan

Research output: Contribution to journalArticleOtherpeer-review

Original languageEnglish
Pages (from-to)1 - 4
Number of pages4
JournalApplied Physics Letters
Volume104
Issue number15
DOIs
Publication statusPublished - 2014

Cite this

Coskun, Mustafa Bulut ; Moore, Steven I ; Moheimani, Seyed O Reza ; Neild, Adrian ; Alan, Tuncay. / Zero displacement microelectromechanical force sensor using feedback control. In: Applied Physics Letters. 2014 ; Vol. 104, No. 15. pp. 1 - 4.
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Zero displacement microelectromechanical force sensor using feedback control. / Coskun, Mustafa Bulut; Moore, Steven I; Moheimani, Seyed O Reza; Neild, Adrian; Alan, Tuncay.

In: Applied Physics Letters, Vol. 104, No. 15, 2014, p. 1 - 4.

Research output: Contribution to journalArticleOtherpeer-review

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AU - Coskun, Mustafa Bulut

AU - Moore, Steven I

AU - Moheimani, Seyed O Reza

AU - Neild, Adrian

AU - Alan, Tuncay

PY - 2014

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JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

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