Zero displacement microelectromechanical force sensor using feedback control

Mustafa Bulut Coskun, Steven I Moore, Seyed O Reza Moheimani, Adrian Neild, Tuncay Alan

Research output: Contribution to journal › Article › Other › peer-review

14 Citations (Scopus)

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title = "Zero displacement microelectromechanical force sensor using feedback control",

author = "Coskun, {Mustafa Bulut} and Moore, {Steven I} and Moheimani, {Seyed O Reza} and Adrian Neild and Tuncay Alan",

year = "2014",

doi = "10.1063/1.4871380",

language = "English",

volume = "104",

pages = "1 -- 4",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AIP Publishing",

number = "15",

}

TY - JOUR

T1 - Zero displacement microelectromechanical force sensor using feedback control

AU - Coskun, Mustafa Bulut

AU - Moore, Steven I

AU - Moheimani, Seyed O Reza

AU - Neild, Adrian

AU - Alan, Tuncay

PY - 2014

Y1 - 2014

UR - http://scitation.aip.org/deliver/fulltext/aip/journal/apl/104/15/1.4871380.pdf

U2 - 10.1063/1.4871380

DO - 10.1063/1.4871380

M3 - Article

VL - 104

SP - 1

EP - 4

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 15

ER -