Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Tuomas Pensala; Jyrki Kiihamaki; Jukka Kyynarainen; James Dekker; Sergey Gorelick; Panu Pekko; Tapio Pernu; Oili Ylivaara; Feng Gao; Dmitry Morits

doi:10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Tuomas Pensala, Jyrki Kiihamaki, Jukka Kyynarainen, James Dekker, Sergey Gorelick, Panu Pekko, Tapio Pernu, Oili Ylivaara, Feng Gao, Dmitry Morits

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research

20 Citations (Scopus)

Abstract

Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm³, and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V_pp.

Original language	English
Title of host publication	2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings
Place of Publication	Red Hook, NY
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	1977-1980
Number of pages	4
ISBN (Electronic)	9781728145969
ISBN (Print)	9781728145976
DOIs	https://doi.org/10.1109/ULTSYM.2019.8925660
Publication status	Published - 2019
Externally published	Yes
Event	IEEE International Ultrasonics Symposium (IUS) 2019 - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019 https://ieeexplore.ieee.org/xpl/conhome/8914674/proceeding (Proceedings)

Conference

Conference	IEEE International Ultrasonics Symposium (IUS) 2019
Abbreviated title	IUS 2019
Country/Territory	United Kingdom
City	Glasgow
Period	6/10/19 → 9/10/19
Internet address	https://ieeexplore.ieee.org/xpl/conhome/8914674/proceeding (Proceedings)

Keywords

AlN
automotive
LIDAR
MEMS
mirror
SOI

Access to Document

10.1109/ULTSYM.2019.8925660

Cite this

Pensala, T., Kiihamaki, J., Kyynarainen, J., Dekker, J., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O., Gao, F., & Morits, D. (2019). Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. In 2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings (pp. 1977-1980). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ULTSYM.2019.8925660

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title = "Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications",

abstract = "Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm3, and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 Vpp.",

keywords = "AlN, automotive, LIDAR, MEMS, mirror, SOI",

author = "Tuomas Pensala and Jyrki Kiihamaki and Jukka Kyynarainen and James Dekker and Sergey Gorelick and Panu Pekko and Tapio Pernu and Oili Ylivaara and Feng Gao and Dmitry Morits",

year = "2019",

doi = "10.1109/ULTSYM.2019.8925660",

language = "English",

isbn = "9781728145976",

pages = "1977--1980",

booktitle = "2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Ultrasonics Symposium (IUS) 2019, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",

url = "https://ieeexplore.ieee.org/xpl/conhome/8914674/proceeding",

}

Pensala, T, Kiihamaki, J, Kyynarainen, J, Dekker, J, Gorelick, S, Pekko, P, Pernu, T, Ylivaara, O, Gao, F & Morits, D 2019, Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. in 2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings. IEEE, Institute of Electrical and Electronics Engineers, Red Hook, NY, pp. 1977-1980, IEEE International Ultrasonics Symposium (IUS) 2019, Glasgow, United Kingdom, 6/10/19. https://doi.org/10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. / Pensala, Tuomas; Kiihamaki, Jyrki; Kyynarainen, Jukka et al.
2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings. Red Hook, NY: IEEE, Institute of Electrical and Electronics Engineers, 2019. p. 1977-1980.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research

TY - GEN

T1 - Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

AU - Pensala, Tuomas

AU - Kiihamaki, Jyrki

AU - Kyynarainen, Jukka

AU - Dekker, James

AU - Gorelick, Sergey

AU - Pekko, Panu

AU - Pernu, Tapio

AU - Ylivaara, Oili

AU - Gao, Feng

AU - Morits, Dmitry

PY - 2019

Y1 - 2019

N2 - Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm3, and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 Vpp.

AB - Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm3, and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 Vpp.

KW - AlN

KW - automotive

KW - LIDAR

KW - MEMS

KW - mirror

KW - SOI

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U2 - 10.1109/ULTSYM.2019.8925660

DO - 10.1109/ULTSYM.2019.8925660

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SN - 9781728145976

SP - 1977

EP - 1980

BT - 2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Red Hook, NY

T2 - IEEE International Ultrasonics Symposium (IUS) 2019

Y2 - 6 October 2019 through 9 October 2019

ER -

Pensala T, Kiihamaki J, Kyynarainen J, Dekker J, Gorelick S, Pekko P et al. Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. In 2019 IEEE International Ultrasonics Symposium (IUS 2019) Proceedings. Red Hook, NY: IEEE, Institute of Electrical and Electronics Engineers. 2019. p. 1977-1980 doi: 10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Abstract

Conference

Keywords

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