Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Joan Vila-Comamala, Sergey Gorelick, Elina Färm, Cameron M. Kewish, Ana Diaz, Ray Barrett, Vitaliy A. Guzenko, Mikko Ritala, Christian David

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X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4"12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

Original languageEnglish
Pages (from-to)175-184
Number of pages10
JournalOptics Express
Issue number1
Publication statusPublished - 3 Jan 2011
Externally publishedYes

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