Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Joan Vila-Comamala; Sergey Gorelick; Elina Färm; Cameron M. Kewish; Ana Diaz; Ray Barrett; Vitaliy A. Guzenko; Mikko Ritala; Christian David

doi:10.1364/OE.19.000175

Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Joan Vila-Comamala, Sergey Gorelick, Elina Färm, Cameron M. Kewish, Ana Diaz, Ray Barrett, Vitaliy A. Guzenko, Mikko Ritala, Christian David

Research output: Contribution to journal › Article › Research › peer-review

110 Citations (Scopus)

Abstract

X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4"12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

Original language	English
Pages (from-to)	175-184
Number of pages	10
Journal	Optics Express
Volume	19
Issue number	1
DOIs	https://doi.org/10.1364/OE.19.000175
Publication status	Published - 3 Jan 2011
Externally published	Yes

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abstract = "X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4{"}12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.",

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AU - Gorelick, Sergey

AU - Färm, Elina

AU - Kewish, Cameron M.

AU - Diaz, Ana

AU - Barrett, Ray

AU - Guzenko, Vitaliy A.

AU - Ritala, Mikko

AU - David, Christian

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AB - X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4"12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

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ER -

Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

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