Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration

Timothy Ter Fong Khoo, Dinh Huy Dang, James Friend, Denny Nurjanto Oetomo, Leslie Yu-Ming Yeo

Research output: Contribution to journalArticleResearchpeer-review

36 Citations (Scopus)
Original languageEnglish
Pages (from-to)1716 - 1724
Number of pages9
JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Issue number8
Publication statusPublished - 2009

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