Abstract
Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.
Original language | English |
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Pages (from-to) | 2486-2488 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 53 |
Issue number | 25 |
DOIs | |
Publication status | Published - 1 Dec 1988 |
Externally published | Yes |