Trapping of Au in Si during pulsed laser irradiation: a comparison with ion beam induced segregation

F. Priolo, J. M. Poate, D. C. Jacobson, J. L. Batstone, J. S. Custer, Michael O. Thompson

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Abstract

Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.

Original languageEnglish
Pages (from-to)2486-2488
Number of pages3
JournalApplied Physics Letters
Volume53
Issue number25
DOIs
Publication statusPublished - 1 Dec 1988
Externally publishedYes

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