Trapping of Au in Si during pulsed laser irradiation: a comparison with ion beam induced segregation

F. Priolo; J. M. Poate; D. C. Jacobson; J. L. Batstone; J. S. Custer; Michael O. Thompson

doi:10.1063/1.100221

Trapping of Au in Si during pulsed laser irradiation: a comparison with ion beam induced segregation

F. Priolo, J. M. Poate, D. C. Jacobson, J. L. Batstone, J. S. Custer, Michael O. Thompson

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Abstract

Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.

Original language	English
Pages (from-to)	2486-2488
Number of pages	3
Journal	Applied Physics Letters
Volume	53
Issue number	25
DOIs	https://doi.org/10.1063/1.100221
Publication status	Published - 1 Dec 1988
Externally published	Yes

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10.1063/1.100221

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Cite this

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title = "Trapping of Au in Si during pulsed laser irradiation: a comparison with ion beam induced segregation",

abstract = "Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.",

author = "F. Priolo and Poate, {J. M.} and Jacobson, {D. C.} and Batstone, {J. L.} and Custer, {J. S.} and Thompson, {Michael O.}",

year = "1988",

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journal = "Applied Physics Letters",

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T1 - Trapping of Au in Si during pulsed laser irradiation

T2 - a comparison with ion beam induced segregation

AU - Priolo, F.

AU - Poate, J. M.

AU - Jacobson, D. C.

AU - Batstone, J. L.

AU - Custer, J. S.

AU - Thompson, Michael O.

PY - 1988/12/1

Y1 - 1988/12/1

N2 - Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.

AB - Liquid phase nonequilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation are reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/s, the segregation coefficient is 0.1±0.02 and Au is trapped in near-substitutional lattice sites at concentrations of 0.5 at. %. These results are compared with recent data on solid phase, ion beam induced segregation, where Au at the amorphous-crystal interface is trapped on nonunique lattice sites.

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