Towards identification of latent defects: yield mining using defect characteristic model and clustering

Melanie Ooi, Chris Chan, Su-Lyn Lee, Ajay Achath Mohanan

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
    EditorsWalter Schoenleber, Brett Williams
    Place of PublicationCalifornia USA
    PublisherIEEE, Institute of Electrical and Electronics Engineers
    Pages194 - 199
    Number of pages6
    Volume1
    ISBN (Print)9781424436156
    Publication statusPublished - 2009
    EventIEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Berlin Germany, California USA
    Duration: 1 Jan 2009 → …

    Conference

    ConferenceIEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
    CityCalifornia USA
    Period1/01/09 → …

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