Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

Peter Ercius, Matthew Weyland, David A Muller, Lynne Gignac

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Published online 15 June 2006; DOI: 10.1063/1.2213185
Original languageEnglish
Pages (from-to)243116 - 243116-3
Number of pages3
JournalApplied Physics Letters
Volume88
Issue number24
Publication statusPublished - 2006

Cite this

Ercius, Peter ; Weyland, Matthew ; Muller, David A ; Gignac, Lynne. / Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography. In: Applied Physics Letters. 2006 ; Vol. 88, No. 24. pp. 243116 - 243116-3.
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abstract = "Published online 15 June 2006; DOI: 10.1063/1.2213185",
author = "Peter Ercius and Matthew Weyland and Muller, {David A} and Lynne Gignac",
year = "2006",
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journal = "Applied Physics Letters",
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Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography. / Ercius, Peter; Weyland, Matthew; Muller, David A; Gignac, Lynne.

In: Applied Physics Letters, Vol. 88, No. 24, 2006, p. 243116 - 243116-3.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

AU - Ercius, Peter

AU - Weyland, Matthew

AU - Muller, David A

AU - Gignac, Lynne

PY - 2006

Y1 - 2006

N2 - Published online 15 June 2006; DOI: 10.1063/1.2213185

AB - Published online 15 June 2006; DOI: 10.1063/1.2213185

M3 - Article

VL - 88

SP - 243116 - 243116-3

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 24

ER -