Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

Peter Ercius, Matthew Weyland, David A Muller, Lynne Gignac

Research output: Contribution to journalArticleResearchpeer-review

64 Citations (Scopus)

Abstract

Published online 15 June 2006; DOI: 10.1063/1.2213185
Original languageEnglish
Pages (from-to)243116 - 243116-3
Number of pages3
JournalApplied Physics Letters
Volume88
Issue number24
Publication statusPublished - 2006

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