@article{a4f230705ab3471482e035b0c0a02db9,
title = "Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography",
author = "Ercius, \{P. A.\} and Muller, \{D. A.\} and M. Weyland and Gignac, \{L. M.\}",
year = "2006",
month = aug,
day = "1",
doi = "10.1017/S1431927606062805",
language = "English",
volume = "12",
pages = "1554--1555",
journal = "Microscopy and Microanalysis",
issn = "1431-9276",
publisher = "Cambridge University Press",
number = "SUPPL. 2",
}