Three dimensional electrostatic actuators for tunable optical micro cavities

Prasanna Srinivasan; Carsten Gollasch; Michael Kraft

doi:10.1016/j.sna.2010.05.012

Three dimensional electrostatic actuators for tunable optical micro cavities

Prasanna Srinivasan
, Carsten Gollasch
, Michael Kraft

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	191 - 198
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	161
Issue number	1-2
DOIs	https://doi.org/10.1016/j.sna.2010.05.012
Publication status	Published - 2010
Externally published	Yes

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10.1016/j.sna.2010.05.012

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title = "Three dimensional electrostatic actuators for tunable optical micro cavities",

author = "Prasanna Srinivasan and Carsten Gollasch and Michael Kraft",

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AU - Gollasch, Carsten

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-2

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Three dimensional electrostatic actuators for tunable optical micro cavities

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