Three dimensional electrostatic actuators for tunable optical micro cavities

Prasanna Srinivasan, Carsten Gollasch, Michael Kraft

Research output: Contribution to journalArticleResearchpeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)191 - 198
Number of pages8
JournalSensors and Actuators, A: Physical
Volume161
Issue number1-2
DOIs
Publication statusPublished - 2010
Externally publishedYes

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