Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

K van Bentham; Andrew Lupini; M Oxley; Scott Findlay; Leslie Allen; Stephen Pennycook

doi:10.1016/j.ultramic.2006.04.020

Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

K van Bentham, Andrew Lupini, M Oxley, Scott Findlay, Leslie Allen, Stephen Pennycook

Research output: Contribution to journal › Article › Research › peer-review

114 Citations (Scopus)

Abstract

Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 ?? 0.1 ?? 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

Original language	English
Pages (from-to)	1062 - 1068
Number of pages	7
Journal	Ultramicroscopy
Volume	106
Issue number	11-12
DOIs	https://doi.org/10.1016/j.ultramic.2006.04.020
Publication status	Published - 2006
Externally published	Yes

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10.1016/j.ultramic.2006.04.020

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abstract = "Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 ?? 0.1 ?? 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.",

author = "{van Bentham}, K and Andrew Lupini and M Oxley and Scott Findlay and Leslie Allen and Stephen Pennycook",

year = "2006",

doi = "10.1016/j.ultramic.2006.04.020",

language = "English",

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pages = "1062 -- 1068",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier BV",

number = "11-12",

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TY - JOUR

T1 - Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

AU - van Bentham, K

AU - Lupini, Andrew

AU - Oxley, M

AU - Findlay, Scott

AU - Allen, Leslie

AU - Pennycook, Stephen

PY - 2006

Y1 - 2006

N2 - Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 ?? 0.1 ?? 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

AB - Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 ?? 0.1 ?? 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

UR - http://www.sciencedirect.com/science/article/pii/S0304399106001069

U2 - 10.1016/j.ultramic.2006.04.020

DO - 10.1016/j.ultramic.2006.04.020

M3 - Article

SN - 0304-3991

VL - 106

SP - 1062

EP - 1068

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 11-12

ER -

Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

Abstract

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