TY - JOUR
T1 - The properties of BaSn0.15Ti0.85O3 thin film prepared by radio frequency magnetron sputtering from powder target
AU - Zhu, Guisheng
AU - Yang, Zupei
AU - Yang, Huijuan
AU - Xu, Huarui
AU - Yu, Aibing
PY - 2010
Y1 - 2010
N2 - The properties of BaSn0.15Ti0.85O3 (BST) thin film with the thickness of 300 nm deposited from powder target using radio frequency (RF) magnetron sputtering technique is demonstrated. The deposition rate of BST film is estimated to be 40 nm/min, which is fast for ferroelectric materials. The dielectric constant of the film decreases from 10 kHz to 1MHz with the increasing frequency, but the dielectric loss remains small (
AB - The properties of BaSn0.15Ti0.85O3 (BST) thin film with the thickness of 300 nm deposited from powder target using radio frequency (RF) magnetron sputtering technique is demonstrated. The deposition rate of BST film is estimated to be 40 nm/min, which is fast for ferroelectric materials. The dielectric constant of the film decreases from 10 kHz to 1MHz with the increasing frequency, but the dielectric loss remains small (
UR - http://onlinelibrary.wiley.com.ezproxy.lib.monash.edu.au/doi/10.1111/j.1551-2916.2010.03942.x/epdf
U2 - 10.1111/j.1551-2916.2010.03942.x
DO - 10.1111/j.1551-2916.2010.03942.x
M3 - Article
SN - 0002-7820
VL - 93
SP - 2972
EP - 2974
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 10
ER -