The properties of BaSn0.15Ti0.85O3 thin film prepared by radio frequency magnetron sputtering from powder target

Guisheng Zhu, Zupei Yang, Huijuan Yang, Huarui Xu, Aibing Yu

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3 Citations (Scopus)


The properties of BaSn0.15Ti0.85O3 (BST) thin film with the thickness of 300 nm deposited from powder target using radio frequency (RF) magnetron sputtering technique is demonstrated. The deposition rate of BST film is estimated to be 40 nm/min, which is fast for ferroelectric materials. The dielectric constant of the film decreases from 10 kHz to 1MHz with the increasing frequency, but the dielectric loss remains small (
Original languageEnglish
Pages (from-to)2972 - 2974
Number of pages3
JournalJournal of the American Ceramic Society
Issue number10
Publication statusPublished - 2010
Externally publishedYes

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