The characterisation of SiGe/Si multilayers via an unambiguous solution of the inverse problem in x-ray Bragg diffraction

Andrei Yu Nikulin, P Zaumseil, P V Petrashen

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	2373 - 2378
Number of pages	6
Journal	Journal of Physics D: Applied Physics
Publication status	Published - 1997

Cite this

@article{31a7c556b6a54bb9a0f869ab4207dd29,

title = "The characterisation of SiGe/Si multilayers via an unambiguous solution of the inverse problem in x-ray Bragg diffraction",

author = "Nikulin, {Andrei Yu} and P Zaumseil and Petrashen, {P V}",

year = "1997",

language = "English",

pages = "2373 -- 2378",

journal = "Journal of Physics D: Applied Physics",

issn = "0022-3727",

publisher = "IOP Publishing",

}