TY - JOUR
T1 - The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications
AU - Dickson, Ronald Stanley
AU - Yin, Ping
AU - Ke, Mingzhe
AU - Johnson, Julian
AU - Deacon, Glen B.
PY - 1996/7
Y1 - 1996/7
N2 - Eleven cobalt complexes of the types [Co(CO)2(NO)L](L = PEt3, TeMe2 or TeEt2) and [(η3-C3H3R2)Co(CO) 2L](R = H or Me; L = CO, PEt3, TeEt2 or CNR′ with R′ = Pri, But or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)2(NO)(TeMe2)], and the allyl complexes [(η3-C3H5)Co(CO)3],[(η 3-C3H4Me)Co(CO)3],[(η 3-C3H3Me2)Co(CO)3] and [(η3-C3H5)Co(CO)2(CNBu t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)2(NO)(TeMe2)] and [(η3-C3H5)Co(CO)3], which gave clean Co films after decomposition at 150 and 250°C, respectively.
AB - Eleven cobalt complexes of the types [Co(CO)2(NO)L](L = PEt3, TeMe2 or TeEt2) and [(η3-C3H3R2)Co(CO) 2L](R = H or Me; L = CO, PEt3, TeEt2 or CNR′ with R′ = Pri, But or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)2(NO)(TeMe2)], and the allyl complexes [(η3-C3H5)Co(CO)3],[(η 3-C3H4Me)Co(CO)3],[(η 3-C3H3Me2)Co(CO)3] and [(η3-C3H5)Co(CO)2(CNBu t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)2(NO)(TeMe2)] and [(η3-C3H5)Co(CO)3], which gave clean Co films after decomposition at 150 and 250°C, respectively.
UR - http://www.scopus.com/inward/record.url?scp=0008410903&partnerID=8YFLogxK
U2 - 10.1016/0277-5387(95)00480-7
DO - 10.1016/0277-5387(95)00480-7
M3 - Article
AN - SCOPUS:0008410903
VL - 15
SP - 2237
EP - 2245
JO - Polyhedron
JF - Polyhedron
SN - 0277-5387
IS - 13
ER -