The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications

Ronald Stanley Dickson; Ping Yin; Mingzhe Ke; Julian Johnson; Glen B. Deacon

doi:10.1016/0277-5387(95)00480-7

The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications

Ronald Stanley Dickson, Ping Yin, Mingzhe Ke, Julian Johnson, Glen B. Deacon

School of Chemistry

Research output: Contribution to journal › Article › Research › peer-review

12 Citations (Scopus)

Abstract

Eleven cobalt complexes of the types [Co(CO)₂(NO)L](L = PEt₃, TeMe₂ or TeEt₂) and [(η³-C₃H₃R₂)Co(CO) ₂L](R = H or Me; L = CO, PEt₃, TeEt₂ or CNR′ with R′ = Prⁱ, Bu^t or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)₂(NO)(TeMe₂)], and the allyl complexes [(η³-C₃H₅)Co(CO)₃],[(η ³-C₃H₄Me)Co(CO)₃],[(η ³-C₃H₃Me₂)Co(CO)₃] and [(η³-C₃H₅)Co(CO)₂(CNBu ^t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)₂(NO)(TeMe₂)] and [(η³-C₃H₅)Co(CO)₃], which gave clean Co films after decomposition at 150 and 250°C, respectively.

Original language	English
Pages (from-to)	2237-2245
Number of pages	9
Journal	Polyhedron
Volume	15
Issue number	13
DOIs	https://doi.org/10.1016/0277-5387(95)00480-7
Publication status	Published - Jul 1996

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@article{2067eb523b8549b3858953a7cfc91774,

title = "The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications",

abstract = "Eleven cobalt complexes of the types [Co(CO)2(NO)L](L = PEt3, TeMe2 or TeEt2) and [(η3-C3H3R2)Co(CO) 2L](R = H or Me; L = CO, PEt3, TeEt2 or CNR′ with R′ = Pri, But or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)2(NO)(TeMe2)], and the allyl complexes [(η3-C3H5)Co(CO)3],[(η 3-C3H4Me)Co(CO)3],[(η 3-C3H3Me2)Co(CO)3] and [(η3-C3H5)Co(CO)2(CNBu t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)2(NO)(TeMe2)] and [(η3-C3H5)Co(CO)3], which gave clean Co films after decomposition at 150 and 250°C, respectively.",

author = "Dickson, {Ronald Stanley} and Ping Yin and Mingzhe Ke and Julian Johnson and Deacon, {Glen B.}",

year = "1996",

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T1 - The assessment of some cobalt and cobalt-tellurium complexes for MOCVD applications

AU - Dickson, Ronald Stanley

AU - Yin, Ping

AU - Ke, Mingzhe

AU - Johnson, Julian

AU - Deacon, Glen B.

PY - 1996/7

Y1 - 1996/7

N2 - Eleven cobalt complexes of the types [Co(CO)2(NO)L](L = PEt3, TeMe2 or TeEt2) and [(η3-C3H3R2)Co(CO) 2L](R = H or Me; L = CO, PEt3, TeEt2 or CNR′ with R′ = Pri, But or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)2(NO)(TeMe2)], and the allyl complexes [(η3-C3H5)Co(CO)3],[(η 3-C3H4Me)Co(CO)3],[(η 3-C3H3Me2)Co(CO)3] and [(η3-C3H5)Co(CO)2(CNBu t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)2(NO)(TeMe2)] and [(η3-C3H5)Co(CO)3], which gave clean Co films after decomposition at 150 and 250°C, respectively.

AB - Eleven cobalt complexes of the types [Co(CO)2(NO)L](L = PEt3, TeMe2 or TeEt2) and [(η3-C3H3R2)Co(CO) 2L](R = H or Me; L = CO, PEt3, TeEt2 or CNR′ with R′ = Pri, But or Cy; Cy is cyclohexyl) have been prepared and assessed for MOCVD applications. Measurement of vapour pressures by the Knudson effusion method has established that the room-temperature volatilities of [Co(CO)2(NO)(TeMe2)], and the allyl complexes [(η3-C3H5)Co(CO)3],[(η 3-C3H4Me)Co(CO)3],[(η 3-C3H3Me2)Co(CO)3] and [(η3-C3H5)Co(CO)2(CNBu t)] are sufficient (0.1-4.0 mmHg) to achieve high concentrations in the vapour state. Vapour-phase thermal degradation at 180-250°C of seven complexes carried in a stream of hydrogen gave metal deposits, which were analysed by EDX or XPS. The best behaved complexes were [Co(CO)2(NO)(TeMe2)] and [(η3-C3H5)Co(CO)3], which gave clean Co films after decomposition at 150 and 250°C, respectively.

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