Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace

Kong Eng Ng, Teck Yaw Tiong, Mohdambri Mohamed, Wei Sea Chang, Chang Fu Dee, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther


In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.

Original languageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages4
ISBN (Electronic)9781538652831
Publication statusPublished - 2018
EventIEEE International Conference on Semiconductor Electronics 2018 - Kuala Lumpur, Malaysia
Duration: 15 Aug 201817 Aug 2018
Conference number: 13th (Proceedings)


ConferenceIEEE International Conference on Semiconductor Electronics 2018
Abbreviated titleICSE 2018
CityKuala Lumpur
Internet address


  • nanostructured materials
  • pulsed laser deposition
  • ZnO nanoflakes

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