Synthesis and evaluation of pure-silica-zeolite BEA as low dielectric constant material for microprocessors

Huanting Wang, Anupam Mitra, Tiegang Cao, Zhengbao Wang, Limin Huang, Shang Li, Zijian Li, Yushan Yu

Research output: Contribution to journalArticleResearchpeer-review

57 Citations (Scopus)
Original languageEnglish
Pages (from-to)2946 - 2949
Number of pages4
JournalIndustrial and Engineering Chemistry Research
Volume43(12)
Publication statusPublished - 2004

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