Surface quad beam polymer optical accelerometer

A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, S. Büttgenbach

Research output: Contribution to conferencePaperpeer-review

3 Citations (Scopus)

Abstract

The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by ways of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. Mechanical sensitivity of 34.1 μm/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was done tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.

Original languageEnglish
Pages1546-1549
Number of pages4
Publication statusPublished - 1 Dec 2004
EventIEEE Conference on Sensors 2004 - Vienna, Austria
Duration: 24 Oct 200427 Oct 2004
Conference number: 3rd
https://ieeexplore.ieee.org/xpl/conhome/9624/proceeding (Proceedings)

Conference

ConferenceIEEE Conference on Sensors 2004
Abbreviated titleSENSORS 2004
CountryAustria
CityVienna
Period24/10/0427/10/04
Internet address

Keywords

  • MOEMS
  • Optical accelerometers
  • SU-8

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