Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters

Christian Dwyer, Christian Maunders, Changlin Zheng, Matthew Weyland, Peter Tiemeijer, Joanne Etheridge

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55 Citations (Scopus)

Abstract

Atomic-resolution imaging in the scanning transmission electron microscope (STEM) constitutes a powerful tool for nanostructure characterization. Here, we demonstrate the quantitative interpretation of atomic-resolution high-angle annular dark-field (ADF) STEMimages using an approach that does not rely on adjustable parameters. We measure independently the instrumental parameters that affect sub-0.1 nm-resolution ADF images, quantify their individual and collective contributions to the image intensity, and show that knowledge of these parameters enables a quantitative interpretation of the absolute intensity and contrast across all accessible spatial frequencies. The analysis also provides a method for the in-situ measurement of the STEM’s effective source distribution.
Original languageEnglish
Pages (from-to)1 - 4
Number of pages4
JournalApplied Physics Letters
Volume100
Issue number19
DOIs
Publication statusPublished - 2012

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