Study on solid-liquid interface morphology simulation method and control parameters of Cz-Si under multi-stream coupled environment

Lei Jiang, Ding Liu, Yue Zhao, Zhi-Shang Liu

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)

Abstract

The problem of solid-liquid interface morphology which plays an important role in crystal growth is a moving boundary. Whereas coupled with melt convection especially directed with forced convection caused by crystal rotation, moving boundary problem is composed of factors that contain third-party coupling in Cz-Si system. Based on FVM, an iterative solution method is proposed under multi-stream coupled environment through simulation to solid-liquid interface morphology and an analysis method is given to research on crystal rotation impact on interface morphology in this paper. Different from the most simulation results, this paper compared simulation results with the true interface morphology which is obtained by quick lift-off method in practice. By comparing the test, simulation results consistent test well.

Original languageEnglish
Pages (from-to)1762-1767
Number of pages6
JournalRengong Jingti Xuebao/Journal of Synthetic Crystals
Volume41
Issue number6
Publication statusPublished - Dec 2012
Externally publishedYes

Keywords

  • Czochralski silicon
  • Iteration method
  • Moving boundary
  • Solid-liquid interface morphology

Cite this