STM/SEM method for testing bending strength of MEMS beams

Tuncay Alan, Colin Shepherd, Maxim Zalalutdinov, Alan Zehnder, Harold Craighead

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference on Fracture
EditorsAlberto Carpinteri, Yiu-Wing Mai, Robert O Ritchie
Place of PublicationNetherlands
PublisherSpringer
Pages1 - 6
Number of pages6
Volume11
ISBN (Print)9788890318818
Publication statusPublished - 2005
Externally publishedYes
EventInternational Congress on Fracture 2005 - Turin, Italy
Duration: 20 Mar 200525 Mar 2005
Conference number: 11th

Conference

ConferenceInternational Congress on Fracture 2005
Abbreviated titleICF 2005
CountryItaly
CityTurin
Period20/03/0525/03/05

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