We discuss how electron tomography can be implemented using the STEM imaging mode and how 3D reconstructions can be obtained from nanoscale objects. The theory of tomographic reconstruction and how the STEM HAADF signal is ideal for tomographic acquisition are described. Practical issues are highlighted including the acquisition of tilt series, image alignment and choice of reconstruction algorithm. The visualisation and analysis of the reconstruction is also discussed. Problems and advantages specific to STEM tomography are highlighted and a number of examples of STEM tomography across the field of materials science are presented.
|Title of host publication||Scanning transmission electron microscopy|
|Subtitle of host publication||Imaging and analysis|
|Editors||Stephen J. Pennycook, Peter D. Nellist|
|Place of Publication||New York, USA|
|Number of pages||40|
|Publication status||Published - 2011|