Standardless atom counting in scanning transmission electron microscopy

James LeBeau, Scott Findlay, Leslie Allen, Susanne Stemmer

Research output: Contribution to journalArticleResearchpeer-review

153 Citations (Scopus)


We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need for a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanning transmission electron microscope.
Original languageEnglish
Pages (from-to)4405 - 4408
Number of pages4
JournalNano Letters
Issue number11
Publication statusPublished - 2010
Externally publishedYes

Cite this