Sputtering rate of micromilling on water ice with focused ion beam in a cryogenic environment

Jing Fu, Sanjay Joshi, Jeffrey Catchmark

Research output: Contribution to journalArticleResearchpeer-review

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)422 - 429
Number of pages8
JournalJournal of Vacuum Science and Technology A
Volume26
Issue number3
DOIs
Publication statusPublished - 2008
Externally publishedYes

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