Spot focus size effect in spectroscopic ellipsometry of thin films

Tuck Wah Ng, Arthur Tay, Yuheng Wang

Research output: Contribution to journal › Article › Research › peer-review

7 Citations (Scopus)

Abstract

@article{7598e07d73924b8cb8a52ea181421eb4,

title = "Spot focus size effect in spectroscopic ellipsometry of thin films",

abstract = "Spot focus size effect in spectroscopic ellipsometry of thin films",

author = "Ng, {Tuck Wah} and Arthur Tay and Yuheng Wang",

year = "2009",

language = "English",

volume = "282",

pages = "172 -- 176",

journal = "Optics Communications",

issn = "0030-4018",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Spot focus size effect in spectroscopic ellipsometry of thin films

AU - Ng, Tuck Wah

AU - Tay, Arthur

AU - Wang, Yuheng

PY - 2009

Y1 - 2009

N2 - Spot focus size effect in spectroscopic ellipsometry of thin films

AB - Spot focus size effect in spectroscopic ellipsometry of thin films

M3 - Article

SN - 0030-4018

VL - 282

SP - 172

EP - 176

JO - Optics Communications

JF - Optics Communications

IS - 2

ER -