Spot focus size effect in spectroscopic ellipsometry of thin films

Tuck Wah Ng, Arthur Tay, Yuheng Wang

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)

Abstract

Spot focus size effect in spectroscopic ellipsometry of thin films
Original languageEnglish
Pages (from-to)172 - 176
Number of pages5
JournalOptics Communications
Volume282
Issue number2
Publication statusPublished - 2009

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