Abstract
Oxidative treatment effectively reduces residual impurities in the thin films of metal oxide deposited via precursor route enabling reduced temperature of processing. Non-halide based precursors were found to be good candidate which shows that oxidative treatment significantly enhance the rate of bulk metal oxide formation resulting in high mobility transistors.
| Original language | English |
|---|---|
| Title of host publication | Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012 |
| Publisher | Curran Associates |
| Pages | 1786-1788 |
| Number of pages | 3 |
| Volume | 3 |
| ISBN (Print) | 9781627486521 |
| Publication status | Published - 2012 |
| Externally published | Yes |
| Event | International Display Workshops in Conjunction with Asia Display (IDW/AD 2012) - Kyoto International Conference Center, Kyoto, Japan Duration: 4 Dec 2012 → 7 Dec 2012 Conference number: 19th https://www.idw.or.jp/IDW12FP.pdf |
Conference
| Conference | International Display Workshops in Conjunction with Asia Display (IDW/AD 2012) |
|---|---|
| Abbreviated title | IDW/AD 2012 |
| Country/Territory | Japan |
| City | Kyoto |
| Period | 4/12/12 → 7/12/12 |
| Internet address |
Keywords
- Non-halides
- Oxidative treatment
- Thin film transistors