Soft magnetic properties of bcc Fe-Zr-B sputtered films with nanoscale grain size

Akihiro Makino; Kiyonori Suzuki; Akihisa Inoue; Tsuyoshi Masumoto

doi:10.2320/matertrans1989.33.80

Soft magnetic properties of bcc Fe-Zr-B sputtered films with nanoscale grain size

Akihiro Makino, Kiyonori Suzuki, Akihisa Inoue, Tsuyoshi Masumoto

Research output: Contribution to journal › Article › Research › peer-review

25 Citations (Scopus)

Abstract

A nanoscale bcc film with a grain size of 10 to 20 nm was found to be prepared by annealing sputtered Fe-Zr-B amorphous films with solute contents of 4 to 9 at% Zr and 1 to 6 at% B for 3.6 ks in the temperature range of 823 to 923 K. The bcc Fe_89.8Zr_7.7B_2.7 film obtained by annealing at 923 K exhibits a high magnetization (B_xn) of 1.64 T at an applied field of 800 kA/m and a high permeability (μ,) of 3200 at 1 MHz. It is notable that the B_MN and μ, values are comparable to the highest values for various kinds of soft magnetic films reported so far. The reason for the appearance for the good soft magnetic properties is presumably due to the decrease in apparent magnetic anisotropy by the formation of the nanocrystalline bcc structure and the reduction of magnetostriction caused by the dissolution of Zr into the bcc phase.

Original language	English
Pages (from-to)	80-86
Number of pages	7
Journal	Materials Transactions, JIM
Volume	33
Issue number	1
DOIs	https://doi.org/10.2320/matertrans1989.33.80
Publication status	Published - 1 Jan 1992
Externally published	Yes

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title = "Soft magnetic properties of bcc Fe-Zr-B sputtered films with nanoscale grain size",

abstract = "A nanoscale bcc film with a grain size of 10 to 20 nm was found to be prepared by annealing sputtered Fe-Zr-B amorphous films with solute contents of 4 to 9 at% Zr and 1 to 6 at% B for 3.6 ks in the temperature range of 823 to 923 K. The bcc Fe89.8Zr7.7B2.7 film obtained by annealing at 923 K exhibits a high magnetization (Bxn) of 1.64 T at an applied field of 800 kA/m and a high permeability (μ,) of 3200 at 1 MHz. It is notable that the BMN and μ, values are comparable to the highest values for various kinds of soft magnetic films reported so far. The reason for the appearance for the good soft magnetic properties is presumably due to the decrease in apparent magnetic anisotropy by the formation of the nanocrystalline bcc structure and the reduction of magnetostriction caused by the dissolution of Zr into the bcc phase.",

author = "Akihiro Makino and Kiyonori Suzuki and Akihisa Inoue and Tsuyoshi Masumoto",

year = "1992",

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T1 - Soft magnetic properties of bcc Fe-Zr-B sputtered films with nanoscale grain size

AU - Makino, Akihiro

AU - Suzuki, Kiyonori

AU - Inoue, Akihisa

AU - Masumoto, Tsuyoshi

PY - 1992/1/1

Y1 - 1992/1/1

N2 - A nanoscale bcc film with a grain size of 10 to 20 nm was found to be prepared by annealing sputtered Fe-Zr-B amorphous films with solute contents of 4 to 9 at% Zr and 1 to 6 at% B for 3.6 ks in the temperature range of 823 to 923 K. The bcc Fe89.8Zr7.7B2.7 film obtained by annealing at 923 K exhibits a high magnetization (Bxn) of 1.64 T at an applied field of 800 kA/m and a high permeability (μ,) of 3200 at 1 MHz. It is notable that the BMN and μ, values are comparable to the highest values for various kinds of soft magnetic films reported so far. The reason for the appearance for the good soft magnetic properties is presumably due to the decrease in apparent magnetic anisotropy by the formation of the nanocrystalline bcc structure and the reduction of magnetostriction caused by the dissolution of Zr into the bcc phase.

AB - A nanoscale bcc film with a grain size of 10 to 20 nm was found to be prepared by annealing sputtered Fe-Zr-B amorphous films with solute contents of 4 to 9 at% Zr and 1 to 6 at% B for 3.6 ks in the temperature range of 823 to 923 K. The bcc Fe89.8Zr7.7B2.7 film obtained by annealing at 923 K exhibits a high magnetization (Bxn) of 1.64 T at an applied field of 800 kA/m and a high permeability (μ,) of 3200 at 1 MHz. It is notable that the BMN and μ, values are comparable to the highest values for various kinds of soft magnetic films reported so far. The reason for the appearance for the good soft magnetic properties is presumably due to the decrease in apparent magnetic anisotropy by the formation of the nanocrystalline bcc structure and the reduction of magnetostriction caused by the dissolution of Zr into the bcc phase.

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Soft magnetic properties of bcc Fe-Zr-B sputtered films with nanoscale grain size

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