Si/SiO2 interface: New structures and well-defined model systems

Mark M. Banaszak Holl, F. Read McFeely

Research output: Contribution to journalArticleResearchpeer-review

107 Citations (Scopus)

Abstract

A well-defined silicon oxide/silicon interface way synthesized by the reaction of the precursor cluster H8Si8O12 with Si(100) surface and characterized using Si 2p core level photoemission spectroscopy. Information gained regarding the assignments of silicon oxide group shifts and peak widths is used to evaluate assumptions and assignments of photoemission spectra of silicon oxide interfaces.

Original languageEnglish
Pages (from-to)2441-2444
Number of pages4
JournalPhysical Review Letters
Volume71
Issue number15
DOIs
Publication statusPublished - 1 Jan 1993
Externally publishedYes

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