Simultaneous capacitive and electrothermal position sensing in a micromachined nanopoisitioner

Yong Zhu, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journalArticleResearchpeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)1146 - 1148
Number of pages3
JournalIEEE Electron Device Letters
Volume32
Issue number8
DOIs
Publication statusPublished - 2011
Externally publishedYes

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