Simultaneous capacitive and electrothermal position sensing in a micromachined nanopoisitioner

Yong Zhu, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1146 - 1148
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	32
Issue number	8
DOIs	https://doi.org/10.1109/LED.2011.2155027
Publication status	Published - 2011
Externally published	Yes

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AU - Zhu, Yong

AU - Moheimani, Seyed

AU - Yuce, Mehmet

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