Simulation of surface effects in energy dissipation of ultrahighfrequency (UHF) nanocantilevers

Kun Yan, Ai Kah Soh

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther


Devices composed of nanoelectromechanical systems (NEMS) possess distinguished properties which make them quite suitable for a variety of applications including ultra-high-frequency (UHF) resonators. However, most GHz resonators have low quality factor even though it has been well above 10 3∼ 105 for very-high-frequency (VHF) microresonators. The motivation for our investigation of single crystal silicon nanoresonator arises from both its technological importance and its extraordinary surface effects. Our simulation results show that the quality factor decreased in a nearly linear manner as the surface area to volume ratio (SVR) was increased, which suggests that surface losses play a significant role in determining the quality factor of nanoresonators.

Original languageEnglish
Title of host publicationModeling, Signal Processing, and Control for Smart Structures 2008
Publication statusPublished - 2008
Externally publishedYes
EventConference on Modeling, Signal Processing, and Control for Smart Structures 2008 - San Diego, United States of America
Duration: 10 Mar 200812 Mar 2008 (Proceedings)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceConference on Modeling, Signal Processing, and Control for Smart Structures 2008
Country/TerritoryUnited States of America
CitySan Diego
Internet address


  • Nanoresonator
  • Quality factor
  • Surface area to volume ratio

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