Silicon at the fundamental scaling limit-atomic-scale donor-based quantum electronics

Bent Weber, Y. H Matthias Tan, Suddhasatta Mahapatra, Thomas F. Watson, Hoon Ryu, Sunhee Lee, Rajib Rahman, Lloyd C L Hollenberg, Gerhard Klimeck, Michelle Y. Simmons

Research output: Contribution to conferenceAbstract


On the route to scalability in donor-based quantum computing architectures, we report on recent advances in the atomic-precision engineering of donor-based electronic devices in silicon, fabricated by STM hydrogen lithography, gas-phase δ-doping, and silicon homoepitaxy [1-3].

Original languageEnglish
Number of pages2
Publication statusPublished - 4 Dec 2015
Externally publishedYes
EventIEEE Silicon Nanoelectronics Workshop 2014 - Hilton Hawaiian Village, Honolulu HI, United States of America
Duration: 8 Jun 20149 Jun 2014


WorkshopIEEE Silicon Nanoelectronics Workshop 2014
Abbreviated titleSNW 2014
Country/TerritoryUnited States of America
CityHonolulu HI
Internet address

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