Shell-type micromechanical oscillator

Maxim Zalalutdinov, Keith Aubin, Christopher Michael, Robert Reichenbach, Tuncay Alan, Alan Zehnder, Brian Houston, Jeevak Parpia, Harold Craighead

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

9 Citations (Scopus)
Original languageEnglish
Title of host publicationSmart Sensors, Actuators and MEMS Conference Proceedings
EditorsJung-Chih Chiao, Vijay K Varadan, Carles Cane
Place of PublicationUnited States
PublisherSPIE
Pages229 - 236
Number of pages8
Volume5116
ISBN (Print)0819449768
DOIs
Publication statusPublished - 2003
Externally publishedYes
EventSmart Sensors, Actuators and MEMS - Maspalomas, Gran Canaria, Spain, United States
Duration: 1 Jan 2003 → …

Conference

ConferenceSmart Sensors, Actuators and MEMS
CityUnited States
Period1/01/03 → …

Cite this