Abstract
In an operation mode of atomic force microscopy that uses a higher eigenmode to determine the physical properties of material surface, the ratio between the eigenfrequency of a higher flexural eigenmode and that of the first flexural eigenmode was identified as an important parameter that affects the sensitivity and accessibility. Structure features such as cut-out are often used to tune the ratio of eigenfrequencies and to enhance the performance. However, there lacks a systematic and automatic method for tailoring the ratio. In order to deal with this issue, a shape and topology optimization problem is formulated, where the ratio between two eigenfrequencies is defined as a constraint and the area of the cantilever is maximized. The optimization problem is solved via the level set based method.
Original language | English |
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Pages (from-to) | 50-57 |
Number of pages | 8 |
Journal | Frontiers of Mechanical Engineering |
Volume | 9 |
Issue number | 1 |
DOIs | |
Publication status | Published - Mar 2014 |
Externally published | Yes |
Keywords
- atomic force microscopy
- cantilever probe
- eigenfrequency
- optimization