Shape and topology optimization for tailoring the ratio between two flexural eigenfrequencies of atomic force microscopy cantilever probe

Qi Xia, Tao Zhou, Michael Yu Wang, Tielin Shi

Research output: Contribution to journalArticleResearchpeer-review

13 Citations (Scopus)

Abstract

In an operation mode of atomic force microscopy that uses a higher eigenmode to determine the physical properties of material surface, the ratio between the eigenfrequency of a higher flexural eigenmode and that of the first flexural eigenmode was identified as an important parameter that affects the sensitivity and accessibility. Structure features such as cut-out are often used to tune the ratio of eigenfrequencies and to enhance the performance. However, there lacks a systematic and automatic method for tailoring the ratio. In order to deal with this issue, a shape and topology optimization problem is formulated, where the ratio between two eigenfrequencies is defined as a constraint and the area of the cantilever is maximized. The optimization problem is solved via the level set based method.

Original languageEnglish
Pages (from-to)50-57
Number of pages8
JournalFrontiers of Mechanical Engineering
Volume9
Issue number1
DOIs
Publication statusPublished - Mar 2014
Externally publishedYes

Keywords

  • atomic force microscopy
  • cantilever probe
  • eigenfrequency
  • optimization

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