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Self-aligned structures by a single-step through-membrane 100-keV electron beam lithography

  • Sergey Gorelick
  • , Alex De Marco

Research output: Contribution to journal › Article › Research › peer-review

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  • Finished

    ARC Centre of Excellence in Advanced Molecular Imaging

    Whisstock, J. (Primary Chief Investigator (PCI)), Abbey, B. (Chief Investigator (CI)), Nugent, K. A. (Chief Investigator (CI)), Quiney, H. M. (Chief Investigator (CI)), Godfrey, D. I. (Chief Investigator (CI)), Heath, W. (Chief Investigator (CI)), Fairlie, D. (Chief Investigator (CI)), Chapman, H. (Partner Investigator (PI)), Peele, A. (Partner Investigator (PI)), Davey, J. (Partner Investigator (PI)) & Wittmann, A. (Project Manager)

    30/06/14 → 31/03/21

    Project: Research