Scattering matrix approach to design of one-port surface acoustic wave resonator sensors utilizing reflectors as sensing element

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Abstract

It has been recently demonstrated that one-port surface acoustic wave (SAW) resonators known for their high ${Q}$ value and relatively small device footprint could be utilized for in-liquid mass loading sensing applications where only the reflectors of the device are coated with the sensing film, while the interdigital transducer (IDT) is isolated from the sensing environment. The sensor relies on changes induced in reflectivity and phase velocity of SAW in the region of the reflectors upon detection of the measurand and is particularly advantageous for SAW resonator-Type sensors as any contact of the sensing film with the IDT could change its static capacitance during sensing and thereby introduce serious instability in the sensor response. Accordingly, in the present work, the existing scattering matrix approach to the design of one-port SAW resonator filters, which does not cater to the integration of sensing film on the resonator surface, is adapted to develop a method to design one-port SAW resonator sensors utilizing reflectors as sensing element. The reflector block of the one-port SAW resonator is readily split into sensing-Active and sensing-inactive parts using the SAW grating transmission matrix in order to study the changes introduced in input admittance of the device for varying level of coverage of the sensing film. The theoretical design approach presented in this work could be used to fabricate high-performance one-port SAW resonator sensors operating at its point of highest sensitivity while utilizing one of the device reflectors as sensing element, without the use of additional impedance matching circuit elements.

Original languageEnglish
Pages (from-to)1418-1429
Number of pages12
JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume68
Issue number4
DOIs
Publication statusPublished - Apr 2021

Keywords

  • One-port surface acoustic wave (SAW) resonator
  • SAW grating transmission matrix
  • SAW sensor
  • scattering matrix approach

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