Scanning confocal electron energy-loss microscopy using valence-loss signals

Huolin Xin, Christian Dwyer, David A Muller, Haimei Zheng, Peter Ercius

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6 Citations (Scopus)


Finding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliable reconstruction of materials with sub-10-nm resolution. Such a confocal geometry transfers information from the focused portion of the electron beam and enables rapid three-dimensional (3D) reconstruction by depth sectioning. SCEELM can minimize or eliminate the missing-information cone and the elongation problem that are associated with other depth-sectioning image techniques in a transmission electron microscope. Valence-loss SCEELM data acquisition is an order of magnitude faster and requires little postprocessing compared with tilt-series electron tomography. With postspecimen chromatic aberration (C c) correction, SCEELM signals can be acquired in parallel in the direction of energy dispersion with the aid of a physical pinhole. This increases the efficiency by 10?-100?, and can provide 3D resolved chemical information for multiple core-loss signals simultaneously.
Original languageEnglish
Pages (from-to)1036 - 1049
Number of pages14
JournalMicroscopy and Microanalysis
Issue number4
Publication statusPublished - 2013

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