Robust control framework for piezoelectric actuation systems in micro/nano manipulation

Hwee Choo Liaw, Denny Nurjanto Oetomo, Bijan Shirinzadeh

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

4 Citations (Scopus)

Abstract

Micro/nano manipulation has been identified as one of the key enabling technologies for many emerging challenges. Within this scope, piezoelectric actuators have played major roles in achieving the required nano-resolution motion. This paper proposes a robust control framework for piezoelectric actuation systems to follow specified motion trajectories. The basic concept associated with this methodology lies in the specification of a target performance and the robust control scheme formulation for piezoelectric actuation systems to ensure the convergence of the position tracking error to zero. This control methodology is attractive as its implementation requires only the knowledge of the estimated system parameters and their corresponding bounds, including bound of hysteresis and external disturbances. Feasibility study of the framework for piezoelectric actuation systems in micro/nano manipulation is described. Simulation results validated the suitability of the proposed control approach.

Original languageEnglish
Title of host publicationTencon 2005 IEEE Region 10
EditorsRichard Harris, Horace King
Place of PublicationMelbourne Vic Australia
PublisherSwinburne Press
Pages1 - 6
Number of pages6
ISBN (Print)0780393112, 9780780393110
DOIs
Publication statusPublished - 2005
EventIEEE Tencon (IEEE Region 10 Conference) 2005 - Crown Promenade Hotel, Melbourne, Australia
Duration: 21 Nov 200524 Nov 2005
https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=10758

Publication series

NameIEEE Region 10 Annual International Conference, Proceedings/TENCON
Volume2007

Conference

ConferenceIEEE Tencon (IEEE Region 10 Conference) 2005
CountryAustralia
CityMelbourne
Period21/11/0524/11/05
Internet address

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