Resolution analysis of atomic force microscopy using temporal phase modulation interferometry

Tuck Wah Ng, Osami Sasaki, H T Chua

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@article{3fba3ca4ad1646feab41ae52d765f0db,

title = "Resolution analysis of atomic force microscopy using temporal phase modulation interferometry",

author = "Ng, {Tuck Wah} and Osami Sasaki and Chua, {H T}",

year = "2004",

doi = "10.1117/1.1626126",

language = "English",

volume = "73",

pages = "75 -- 78",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE - International Society for Optical Engineering",

number = "1",

}