Rapid prototyping of highly ordered subwavelength silicon nanostructures with enhanced light trapping

Vivek Garg, Rakesh G. Mote, Jing Fu

Research output: Contribution to journalArticleResearchpeer-review

Abstract

High index nanostructures lead to unique light-matter interactions and strong optical resonances for potential light trapping applications and improved optical performances. In this work, Gaussian shaped subwavelength 3D nanostructures are introduced and rapid prototyping of these nanostructures is carried out on silicon (Si) in a single-step using focused ion beam (FIB) milling. The tapered geometry of Gaussian pillar structures provided reflection suppression from the smaller tip in contrast to its extended base, enabling trapping of light, confirmed through light reflection calculations and hot spots observed through absorption density distributions. The nature of accelerated ions in a FIB system is directly used and highly ordered Gaussian pillar like subwavelength nanostructures are fabricated in a single-step on Si. Simulations and experiments demonstrate nanostructure evolution from periodically spaced subwavelength nanoholes to Gaussian pillar structures with tuning of beam processing parameters, providing fabrication flexibility. The proposed light management structures, investigated through Finite Difference Time Domain (FDTD) calculations, exhibit 10–20% reflection for a broadband visible wavelength range against planar Si and previously reported Si structures (such as nano-cones, nano-wires, nano-pyramids etc.). Experimental results support theoretical predictions and provide evidence for antireflection properties from the fabricated nanostructures. Considering the rapid fabrication approach and tunable nature of Gaussian shaped nanostructures, exhibiting unique optical properties; this work provides realization of nanoscale light management 3D structures for localized light trapping and antireflection applications.

Original languageEnglish
Pages (from-to)75-85
Number of pages11
JournalOptical Materials
Volume94
DOIs
Publication statusPublished - 1 Aug 2019

Keywords

  • Antireflection properties
  • Focused ion beam nanofabrication
  • Light trapping
  • Rapid prototyping
  • Silicon nanophotonics
  • Subwavelength nanostructures

Cite this

@article{93806a88aeda42ddb015629f1cbb52b8,
title = "Rapid prototyping of highly ordered subwavelength silicon nanostructures with enhanced light trapping",
abstract = "High index nanostructures lead to unique light-matter interactions and strong optical resonances for potential light trapping applications and improved optical performances. In this work, Gaussian shaped subwavelength 3D nanostructures are introduced and rapid prototyping of these nanostructures is carried out on silicon (Si) in a single-step using focused ion beam (FIB) milling. The tapered geometry of Gaussian pillar structures provided reflection suppression from the smaller tip in contrast to its extended base, enabling trapping of light, confirmed through light reflection calculations and hot spots observed through absorption density distributions. The nature of accelerated ions in a FIB system is directly used and highly ordered Gaussian pillar like subwavelength nanostructures are fabricated in a single-step on Si. Simulations and experiments demonstrate nanostructure evolution from periodically spaced subwavelength nanoholes to Gaussian pillar structures with tuning of beam processing parameters, providing fabrication flexibility. The proposed light management structures, investigated through Finite Difference Time Domain (FDTD) calculations, exhibit 10–20{\%} reflection for a broadband visible wavelength range against planar Si and previously reported Si structures (such as nano-cones, nano-wires, nano-pyramids etc.). Experimental results support theoretical predictions and provide evidence for antireflection properties from the fabricated nanostructures. Considering the rapid fabrication approach and tunable nature of Gaussian shaped nanostructures, exhibiting unique optical properties; this work provides realization of nanoscale light management 3D structures for localized light trapping and antireflection applications.",
keywords = "Antireflection properties, Focused ion beam nanofabrication, Light trapping, Rapid prototyping, Silicon nanophotonics, Subwavelength nanostructures",
author = "Vivek Garg and Mote, {Rakesh G.} and Jing Fu",
year = "2019",
month = "8",
day = "1",
doi = "10.1016/j.optmat.2019.05.020",
language = "English",
volume = "94",
pages = "75--85",
journal = "Optical Materials",
issn = "0925-3467",
publisher = "Elsevier",

}

Rapid prototyping of highly ordered subwavelength silicon nanostructures with enhanced light trapping. / Garg, Vivek; Mote, Rakesh G.; Fu, Jing.

In: Optical Materials, Vol. 94, 01.08.2019, p. 75-85.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Rapid prototyping of highly ordered subwavelength silicon nanostructures with enhanced light trapping

AU - Garg, Vivek

AU - Mote, Rakesh G.

AU - Fu, Jing

PY - 2019/8/1

Y1 - 2019/8/1

N2 - High index nanostructures lead to unique light-matter interactions and strong optical resonances for potential light trapping applications and improved optical performances. In this work, Gaussian shaped subwavelength 3D nanostructures are introduced and rapid prototyping of these nanostructures is carried out on silicon (Si) in a single-step using focused ion beam (FIB) milling. The tapered geometry of Gaussian pillar structures provided reflection suppression from the smaller tip in contrast to its extended base, enabling trapping of light, confirmed through light reflection calculations and hot spots observed through absorption density distributions. The nature of accelerated ions in a FIB system is directly used and highly ordered Gaussian pillar like subwavelength nanostructures are fabricated in a single-step on Si. Simulations and experiments demonstrate nanostructure evolution from periodically spaced subwavelength nanoholes to Gaussian pillar structures with tuning of beam processing parameters, providing fabrication flexibility. The proposed light management structures, investigated through Finite Difference Time Domain (FDTD) calculations, exhibit 10–20% reflection for a broadband visible wavelength range against planar Si and previously reported Si structures (such as nano-cones, nano-wires, nano-pyramids etc.). Experimental results support theoretical predictions and provide evidence for antireflection properties from the fabricated nanostructures. Considering the rapid fabrication approach and tunable nature of Gaussian shaped nanostructures, exhibiting unique optical properties; this work provides realization of nanoscale light management 3D structures for localized light trapping and antireflection applications.

AB - High index nanostructures lead to unique light-matter interactions and strong optical resonances for potential light trapping applications and improved optical performances. In this work, Gaussian shaped subwavelength 3D nanostructures are introduced and rapid prototyping of these nanostructures is carried out on silicon (Si) in a single-step using focused ion beam (FIB) milling. The tapered geometry of Gaussian pillar structures provided reflection suppression from the smaller tip in contrast to its extended base, enabling trapping of light, confirmed through light reflection calculations and hot spots observed through absorption density distributions. The nature of accelerated ions in a FIB system is directly used and highly ordered Gaussian pillar like subwavelength nanostructures are fabricated in a single-step on Si. Simulations and experiments demonstrate nanostructure evolution from periodically spaced subwavelength nanoholes to Gaussian pillar structures with tuning of beam processing parameters, providing fabrication flexibility. The proposed light management structures, investigated through Finite Difference Time Domain (FDTD) calculations, exhibit 10–20% reflection for a broadband visible wavelength range against planar Si and previously reported Si structures (such as nano-cones, nano-wires, nano-pyramids etc.). Experimental results support theoretical predictions and provide evidence for antireflection properties from the fabricated nanostructures. Considering the rapid fabrication approach and tunable nature of Gaussian shaped nanostructures, exhibiting unique optical properties; this work provides realization of nanoscale light management 3D structures for localized light trapping and antireflection applications.

KW - Antireflection properties

KW - Focused ion beam nanofabrication

KW - Light trapping

KW - Rapid prototyping

KW - Silicon nanophotonics

KW - Subwavelength nanostructures

UR - http://www.scopus.com/inward/record.url?scp=85066150469&partnerID=8YFLogxK

U2 - 10.1016/j.optmat.2019.05.020

DO - 10.1016/j.optmat.2019.05.020

M3 - Article

VL - 94

SP - 75

EP - 85

JO - Optical Materials

JF - Optical Materials

SN - 0925-3467

ER -