Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics

F. R.Mahamd Adikan; J. C. Gates; C. B.E. Gawith; P. G.R. Smith

doi:10.1109/CLEOE-IQEC.2007.4386238

Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics

F. R.Mahamd Adikan, J. C. Gates, C. B.E. Gawith, P. G.R. Smith

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO
Publisher	IEEE, Institute of Electrical and Electronics Engineers
ISBN (Print)	1424409306, 9781424409303
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2007.4386238
Publication status	Published - 2007
Externally published	Yes
Event	European Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007 - Munich, Germany Duration: 17 Jun 2007 → 22 Jun 2007 https://ieeexplore.ieee.org/xpl/conhome/4385798/proceeding (Proceedings)

Conference

Conference	European Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007
Abbreviated title	CLEO/Europe/IQEC 2007
Country/Territory	Germany
City	Munich
Period	17/06/07 → 22/06/07
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4385798/proceeding (Proceedings)

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10.1109/CLEOE-IQEC.2007.4386238

Cite this

Adikan, F. R. M., Gates, J. C., Gawith, C. B. E., & Smith, P. G. R. (2007). Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics. In 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO Article 4386238 IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-IQEC.2007.4386238

Adikan, F. R.Mahamd ; Gates, J. C. ; Gawith, C. B.E. et al. / Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics. 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO. IEEE, Institute of Electrical and Electronics Engineers, 2007.

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title = "Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics",

author = "Adikan, {F. R.Mahamd} and Gates, {J. C.} and Gawith, {C. B.E.} and Smith, {P. G.R.}",

year = "2007",

doi = "10.1109/CLEOE-IQEC.2007.4386238",

language = "English",

isbn = "1424409306",

booktitle = "2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "European Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007, CLEO/Europe/IQEC 2007 ; Conference date: 17-06-2007 Through 22-06-2007",

url = "https://ieeexplore.ieee.org/xpl/conhome/4385798/proceeding",

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Adikan, FRM, Gates, JC, Gawith, CBE & Smith, PGR 2007, Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics. in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO., 4386238, IEEE, Institute of Electrical and Electronics Engineers, European Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007, Munich, Bavaria, Germany, 17/06/07. https://doi.org/10.1109/CLEOE-IQEC.2007.4386238

Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics. / Adikan, F. R.Mahamd; Gates, J. C.; Gawith, C. B.E. et al.
2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO. IEEE, Institute of Electrical and Electronics Engineers, 2007. 4386238.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

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T1 - Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics

AU - Adikan, F. R.Mahamd

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AU - Gawith, C. B.E.

AU - Smith, P. G.R.

PY - 2007

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DO - 10.1109/CLEOE-IQEC.2007.4386238

M3 - Conference Paper

AN - SCOPUS:51249112182

SN - 1424409306

SN - 9781424409303

BT - 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO

PB - IEEE, Institute of Electrical and Electronics Engineers

T2 - European Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007

Y2 - 17 June 2007 through 22 June 2007

ER -

Adikan FRM, Gates JC, Gawith CBE, Smith PGR. Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics. In 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference, CLEO. IEEE, Institute of Electrical and Electronics Engineers. 2007. 4386238 doi: 10.1109/CLEOE-IQEC.2007.4386238

Quantitative determination of photosensitivity proximity effects in multi exposure direct UV writing for high density integrated optics

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