Quantitative atomic resolution scanning transmission electron microscopy

James LeBeau, Scott Findlay, Leslie Allen, Susanne Stemmer

Research output: Contribution to journalArticleResearchpeer-review

269 Citations (Scopus)

Abstract

Complete understanding of atomic resolution high-angle annular dark-field (Z-contrast) images requires quantitative agreement between simulations and experiments. We show that intensity variations can be placed on an absolute scale by normalizing the measured image intensities to the incident beam. We construct fractional intensity images of a SrTiO3 single crystal for regions of different thickness up to 120 nm. Experimental images are compared directly with image simulations. Provided that spatial incoherence is taken into account in the simulations, almost perfect agreement is found between simulation and experiment.
Original languageEnglish
Pages (from-to)206101-1 - 206101-4
Number of pages4
JournalPhysical Review Letters
Volume100
Issue number20
DOIs
Publication statusPublished - 2008
Externally publishedYes

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