Quad beam polymeric optomechanical systems

V. J. Cadarso, A. Llobera, G. Villanueva, V. Seidemann, S. Büttgenbach, J. A. Plaza

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

The design, simulation, fabrication and characterization of two SU-8 based microoptoelectromechanical systems (MOEMS) are presented in this paper: an optical accelerometer and a variable optical attenuator (VOA). Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. In order to overcome the fibre optics positioning, self-alignment structures have been integrated on the devices. Working principle of both devices is based in the modulation of the optical losses (when an acceleration or voltage is applied at the accelerometer or the VOA, respectively). In order to achieve the optimal behaviour, several quad beam configurations have been studied by means of mechanical and optical simulations. An optical sensitivity of 16.58 dB/g has been estimated for the optimal configuration of the accelerometer. The experimental results show a good agreement, with measured optical sensitivities of 13.1 dB/g and 17.5 dB/g for negative and positive accelerations, respectively. On the other hand, the VOA has been electrothermally actuated, taking advantage of the high thermal expansion coefficient (CTE) of the SU-8, to achieve high optical attenuation (20 dB) with low power consumption (12mW).

Original languageEnglish
Article number72660T
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7266
DOIs
Publication statusPublished - 1 Dec 2008
EventOptomechatronic Technologies 2008 - San Diego, CA, United States of America
Duration: 17 Nov 200819 Nov 2008

Keywords

  • Electrothermal actuators
  • Microoptomechanical systems (MOEMS)
  • Optical accelerometers
  • Polymer technology
  • SU-8
  • Variable optical attenuators (VOA)

Cite this

Cadarso, V. J., Llobera, A., Villanueva, G., Seidemann, V., Büttgenbach, S., & Plaza, J. A. (2008). Quad beam polymeric optomechanical systems. Proceedings of SPIE - The International Society for Optical Engineering, 7266, [72660T]. https://doi.org/10.1117/12.807287
Cadarso, V. J. ; Llobera, A. ; Villanueva, G. ; Seidemann, V. ; Büttgenbach, S. ; Plaza, J. A. / Quad beam polymeric optomechanical systems. In: Proceedings of SPIE - The International Society for Optical Engineering. 2008 ; Vol. 7266.
@article{f047f6a10a7043c99d8c0d4f67d82514,
title = "Quad beam polymeric optomechanical systems",
abstract = "The design, simulation, fabrication and characterization of two SU-8 based microoptoelectromechanical systems (MOEMS) are presented in this paper: an optical accelerometer and a variable optical attenuator (VOA). Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. In order to overcome the fibre optics positioning, self-alignment structures have been integrated on the devices. Working principle of both devices is based in the modulation of the optical losses (when an acceleration or voltage is applied at the accelerometer or the VOA, respectively). In order to achieve the optimal behaviour, several quad beam configurations have been studied by means of mechanical and optical simulations. An optical sensitivity of 16.58 dB/g has been estimated for the optimal configuration of the accelerometer. The experimental results show a good agreement, with measured optical sensitivities of 13.1 dB/g and 17.5 dB/g for negative and positive accelerations, respectively. On the other hand, the VOA has been electrothermally actuated, taking advantage of the high thermal expansion coefficient (CTE) of the SU-8, to achieve high optical attenuation (20 dB) with low power consumption (12mW).",
keywords = "Electrothermal actuators, Microoptomechanical systems (MOEMS), Optical accelerometers, Polymer technology, SU-8, Variable optical attenuators (VOA)",
author = "Cadarso, {V. J.} and A. Llobera and G. Villanueva and V. Seidemann and S. B{\"u}ttgenbach and Plaza, {J. A.}",
year = "2008",
month = "12",
day = "1",
doi = "10.1117/12.807287",
language = "English",
volume = "7266",
journal = "SPIE - the International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

Quad beam polymeric optomechanical systems. / Cadarso, V. J.; Llobera, A.; Villanueva, G.; Seidemann, V.; Büttgenbach, S.; Plaza, J. A.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 7266, 72660T, 01.12.2008.

Research output: Contribution to journalConference articleResearchpeer-review

TY - JOUR

T1 - Quad beam polymeric optomechanical systems

AU - Cadarso, V. J.

AU - Llobera, A.

AU - Villanueva, G.

AU - Seidemann, V.

AU - Büttgenbach, S.

AU - Plaza, J. A.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - The design, simulation, fabrication and characterization of two SU-8 based microoptoelectromechanical systems (MOEMS) are presented in this paper: an optical accelerometer and a variable optical attenuator (VOA). Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. In order to overcome the fibre optics positioning, self-alignment structures have been integrated on the devices. Working principle of both devices is based in the modulation of the optical losses (when an acceleration or voltage is applied at the accelerometer or the VOA, respectively). In order to achieve the optimal behaviour, several quad beam configurations have been studied by means of mechanical and optical simulations. An optical sensitivity of 16.58 dB/g has been estimated for the optimal configuration of the accelerometer. The experimental results show a good agreement, with measured optical sensitivities of 13.1 dB/g and 17.5 dB/g for negative and positive accelerations, respectively. On the other hand, the VOA has been electrothermally actuated, taking advantage of the high thermal expansion coefficient (CTE) of the SU-8, to achieve high optical attenuation (20 dB) with low power consumption (12mW).

AB - The design, simulation, fabrication and characterization of two SU-8 based microoptoelectromechanical systems (MOEMS) are presented in this paper: an optical accelerometer and a variable optical attenuator (VOA). Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. In order to overcome the fibre optics positioning, self-alignment structures have been integrated on the devices. Working principle of both devices is based in the modulation of the optical losses (when an acceleration or voltage is applied at the accelerometer or the VOA, respectively). In order to achieve the optimal behaviour, several quad beam configurations have been studied by means of mechanical and optical simulations. An optical sensitivity of 16.58 dB/g has been estimated for the optimal configuration of the accelerometer. The experimental results show a good agreement, with measured optical sensitivities of 13.1 dB/g and 17.5 dB/g for negative and positive accelerations, respectively. On the other hand, the VOA has been electrothermally actuated, taking advantage of the high thermal expansion coefficient (CTE) of the SU-8, to achieve high optical attenuation (20 dB) with low power consumption (12mW).

KW - Electrothermal actuators

KW - Microoptomechanical systems (MOEMS)

KW - Optical accelerometers

KW - Polymer technology

KW - SU-8

KW - Variable optical attenuators (VOA)

UR - http://www.scopus.com/inward/record.url?scp=62449264988&partnerID=8YFLogxK

U2 - 10.1117/12.807287

DO - 10.1117/12.807287

M3 - Conference article

VL - 7266

JO - SPIE - the International Society for Optical Engineering

JF - SPIE - the International Society for Optical Engineering

SN - 0277-786X

M1 - 72660T

ER -