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Pure-silica zeolite low-k dielectric thin films

  • Zhengbao Wang
  • , Huanting Wang
  • , Anupam Mitra
  • , Limin Huang
  • , Yushan Yan

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)746 - 746
Number of pages1
JournalAdvanced Materials
Volume13(10)
Publication statusPublished - 2001

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