Pure-silica zeolite low-k dielectric thin films

Zhengbao Wang, Huanting Wang, Anupam Mitra, Limin Huang, Yushan Yan

Research output: Contribution to journalArticleResearchpeer-review

251 Citations (Scopus)
Original languageEnglish
Pages (from-to)746 - 746
Number of pages1
JournalAdvanced Materials
Volume13(10)
Publication statusPublished - 2001

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