Pure-silica zeolite low-k dielectric thin films

Zhengbao Wang, Huanting Wang, Anupam Mitra, Limin Huang, Yushan Yan

Research output: Contribution to journal › Article › Research › peer-review

Cite this

@article{822947eed69d4909a130939d21ffa655,

title = "Pure-silica zeolite low-k dielectric thin films",

author = "Zhengbao Wang and Huanting Wang and Anupam Mitra and Limin Huang and Yushan Yan",

year = "2001",

language = "English",

volume = "13(10)",

pages = "746 -- 746",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley-VCH Verlag GmbH & Co. KGaA",

}