Pure silica zeolite films as low-k dielectrics by spin-on of nanoparticle suspensions

Huanting Wang, Zhengbao Wang, Anupam Mitra, Limin Huang, Yushan Yan

Research output: Contribution to journal › Article › Research › peer-review

Cite this

@article{99661c0ca8944f08b6e821eb16d40c1e,

title = "Pure silica zeolite films as low-k dielectrics by spin-on of nanoparticle suspensions",

author = "Huanting Wang and Zhengbao Wang and Anupam Mitra and Limin Huang and Yushan Yan",

year = "2001",

language = "English",

volume = "13(19)",

pages = "1463 -- 1466",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley-VCH Verlag GmbH & Co. KGaA",

}