Pure silica zeolite films as low-k dielectrics by spin-on of nanoparticle suspensions

Huanting Wang, Zhengbao Wang, Anupam Mitra, Limin Huang, Yushan Yan

Research output: Contribution to journalArticleResearchpeer-review

199 Citations (Scopus)
Original languageEnglish
Pages (from-to)1463 - 1466
Number of pages4
JournalAdvanced Materials
Volume13(19)
Publication statusPublished - 2001

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