Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

Loïc Jacot-Descombes; Maurizio Rosario Gullo; V. J. Cadarso; Massimo Mastrangeli; J. Brugger

doi:10.1109/NEMS.2013.6559918

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

Loïc Jacot-Descombes
, Maurizio Rosario Gullo
, V. J. Cadarso
, Massimo Mastrangeli
, J. Brugger

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

2 Citations (Scopus)

Abstract

The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	1119-1122
Number of pages	4
ISBN (Print)	9781467363525
DOIs	https://doi.org/10.1109/NEMS.2013.6559918
Publication status	Published - 2013
Externally published	Yes
Event	IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013 - Dushu Lake Hotel, Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013 Conference number: 8th http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6559677

Conference

Conference	IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013
Abbreviated title	NEMS 2013
Country/Territory	China
City	Suzhou
Period	7/04/13 → 10/04/13
Internet address	http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6559677

Keywords

drop-on-demand inkjet printing
hemispherical micro cups
micro shape array
spherical SU-8 structures

Access to Document

10.1109/NEMS.2013.6559918

Cite this

Jacot-Descombes, L., Gullo, M. R., Cadarso, V. J., Mastrangeli, M., & Brugger, J. (2013). Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 1119-1122). Article 6559918 IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/NEMS.2013.6559918

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title = "Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing",

abstract = "The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96\%. The 4\% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.",

keywords = "drop-on-demand inkjet printing, hemispherical micro cups, micro shape array, spherical SU-8 structures",

author = "Lo{\"i}c Jacot-Descombes and Gullo, \{Maurizio Rosario\} and Cadarso, \{V. J.\} and Massimo Mastrangeli and J. Brugger",

year = "2013",

doi = "10.1109/NEMS.2013.6559918",

language = "English",

isbn = "9781467363525",

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booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013, NEMS 2013 ; Conference date: 07-04-2013 Through 10-04-2013",

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}

Jacot-Descombes, L, Gullo, MR, Cadarso, VJ, Mastrangeli, M & Brugger, J 2013, Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559918, IEEE, Institute of Electrical and Electronics Engineers, pp. 1119-1122, IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559918

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing. / Jacot-Descombes, Loïc; Gullo, Maurizio Rosario; Cadarso, V. J. et al.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. IEEE, Institute of Electrical and Electronics Engineers, 2013. p. 1119-1122 6559918.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

AU - Jacot-Descombes, Loïc

AU - Gullo, Maurizio Rosario

AU - Cadarso, V. J.

AU - Mastrangeli, Massimo

AU - Brugger, J.

N1 - Conference code: 8th

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N2 - The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

AB - The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

KW - drop-on-demand inkjet printing

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KW - micro shape array

KW - spherical SU-8 structures

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Y2 - 7 April 2013 through 10 April 2013

ER -

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

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Keywords

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