Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

Loïc Jacot-Descombes, Maurizio Rosario Gullo, V. J. Cadarso, Massimo Mastrangeli, J. Brugger

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

2 Citations (Scopus)

Abstract

The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages1119-1122
Number of pages4
ISBN (Print)9781467363525
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013 - Dushu Lake Hotel, Suzhou, China
Duration: 7 Apr 201310 Apr 2013
Conference number: 8th
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6559677

Conference

ConferenceIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2013
Abbreviated titleNEMS 2013
CountryChina
CitySuzhou
Period7/04/1310/04/13
Internet address

Keywords

  • drop-on-demand inkjet printing
  • hemispherical micro cups
  • micro shape array
  • spherical SU-8 structures

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