Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers

The design, fabrication and characterization of a polymer microoptoelectromecanical system (MOEMS) based in the modulation of the total losses, is presented in this work. Three waveguides are defined on the structure: two at the edges and the third in the middle of the seismic mass. When a horizontal displacement is produced, there is an increase of the losses due to the misalignment between the waveguides. This misalignment is due either to an acceleration (obtaining an acceleration sensor) or using Aluminum as a heater electrode. When a dc voltage is applied, the mechanical beams bend, resulting in a displacement of the seismic mass. In this case, a variable optical attenuator (VOA) is obtained. Experimental results show optical sensitivities of 13.1 dB/g for negative and 17.5 dB/g for positive accelerations when characterized as an accelerometer and a power consumption of only 12 mW at 20 dB when used as a VOA, in both cases using a working wavelength of 633 nm emitted from an LED.