Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators

V. J. Cadarso, A. Llobera, G. Villanueva, V. Seidemann, S. Büttgenbach, J. A. Plaza

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24 Citations (Scopus)


This paper presents the design, fabrication and characterization of polymer microoptoelectromechanical systems (MOEMS). An optical accelerometer and a variable optical attenuator (VOA) based on SU-8 are presented. Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. Self-alignment structures for fast and accurate fiber optic positioning have also been implemented in both devices. The accelerometer working principle consists on a misalignment between the three waveguides, which comprise the structure, as acceleration is applied. Experimental optical sensitivities of 13.1 dB/g for negative and 17.5 dB/g for positive accelerations, and a high repeatability in an uncontrolled atmosphere are observed. Using the same devices and taking advantage of the high thermal expansion (CTE) of the SU-8, it is possible to obtain a low-power consumption VOA. Experimental results show an attenuation of 20 dB for a power consumption of 12 mW.

Original languageEnglish
Pages (from-to)147-153
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number1-2
Publication statusPublished - 1 Jul 2008


  • Electrothermal actuators
  • Microoptomechanical systems (MOEMS)
  • Optical accelerometers
  • Polymer technology
  • SU-8
  • Variable optical attenuators (VOA)

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